Rorora Magnetron Sputtering pūnaha
Ko te nuinga o te miihini whakakikorua magnetron sputtering ko te DC (MF ranei) ka taea te urutau ki te maha o nga whaainga, penei i te: parahi, titanium, chromium, kowiri tira, nickel me etahi atu mea whakarewa ka taea te whakakikorua ma te whakamahi i te tukanga pupuhi. ka taea te whakapai ake i te piri o te kiriata, te reproducibility, te kiato, te taurite me etahi atu ahuatanga.
- a.Ko nga ahuatanga taketake me nga tawhā
- b.Ko te hanganga raina whakapae ka taea te whakakii i te wa kotahi ka pania ki tetahi taha
- c.te pai o te whakaputa, te tere tere ki te 1 min / patu
- d.hoahoa modular, tiaki ngawari
- e.whakakikorua tukanga pakeke, hua tiketike
- f.DC magnetron sputtering cathodes kia rerekē i runga i ngā whakaritenga kiritaki
- g.Ko te punaha korehau he papu miihini, Pua pakiaka, papu tohatoha (papa molecular) Tito
- h.Ka rereke pea te rahi o te tinana o te raina i runga i nga whakaritenga a nga kaihoko
- 1) Ko nga rauemi tinana o te ruma korehau i whakamahia te SUS304, te whakakorikori i te maimoatanga pakitara o te ruma korehau, ko te rehu o waho o te pakitara e whakakorikori ana i nga pirepire tukatuka.
- 2) Ma te whakamahi i te maataki kuaha motuhake i waenga i te ruuma korehau - ka wehe kee te whaa, ka taea te tapahi, te whakapumau i te mahi hau.I tenei wa ka whakamahia e to taatau kamupene te hoahoa whaa whao, he pai ake te hiri, he roa ake i te waa whaa whaa o naianei.
- 3) Ka whakamahia e te tuku te arataki autō, tiakina te pumau o te puku.Mo ia tere o te raina whakaputa katoa ma te whakamahi i te taraiwa motuka VVVF, ka taea te whakarereke i te tere o te rere.
- 4) Pūnaha Mana Hiko: Paa Mata me te PLC te mana aunoa, te korero a te tangata-miihini ki te whakatutuki i te punaha whakaatu raraunga, nga tawhā whakahaere me te hangarau whakahaere.
- 1) Te pehanga korehau mutunga: 6 × 1 0E-4 Pa
- 2) te huringa hanga toharite: kia rite ki te hua kua whakaritea
- 3) Te rahi o te kaipupuri substrate: ka taea te whakarite kia rite ki nga whakaritenga o
- 4) Te riterite o te kiriata: ± 3% kua tino whakarei ake te hangarau mara pūkoro matatau ki te whakamahi i te whaainga
- Ko te hoahoa whakamahana kua wehea he pai ki te mahi arotautanga.
Tuhia to korero ki konei ka tukuna mai ki a matou
